An Introduction to Surface-Micromachining by Robert W. Johnstone,Ash Parmaswaran

By Robert W. Johnstone,Ash Parmaswaran

An creation to Surface-Micromachining offers for the 1st time a unified view of surface-micromachining. increase from the fundamental development block of microfabrication concepts, to the overall surface-micromachining layout, it is going to end with the idea and layout of concrete parts. An advent to Surface-Micromachining connects the producing method, microscale phenomena, and layout information to actual shape and serve as.
This ebook should be of curiosity to mechanical engineers seeking to scale back into micromachining and microelectronics designers trying to circulation horizontally to micromachining.

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